- All sections
- C - Chemistry; metallurgy
- C23C - Coating metallic material; coating material with metallic material; surface treatment of metallic material by diffusion into the surface, by chemical conversion or substitution; coating by vacuum evaporation, by sputtering, by ion implantation or by chemical vapour deposition, in general
- C23C 14/56 - Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
Patent holdings for IPC class C23C 14/56
Total number of patents in this class: 1936
10-year publication summary
128
|
126
|
152
|
185
|
213
|
149
|
148
|
189
|
125
|
53
|
2015 | 2016 | 2017 | 2018 | 2019 | 2020 | 2021 | 2022 | 2023 | 2024 |
Principal owners for this class
Owner |
All patents
|
This class
|
---|---|---|
Applied Materials, Inc. | 16587 |
409 |
ULVAC, Inc. | 1448 |
59 |
Samsung Display Co., Ltd. | 30585 |
54 |
ArcelorMittal | 1887 |
50 |
View, Inc. | 792 |
39 |
Canon Anelva Corporation | 676 |
39 |
Tokyo Electron Limited | 11599 |
33 |
Cardinal CG Company | 226 |
19 |
Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | 6132 |
19 |
Nitto Denko Corporation | 7879 |
18 |
Dyson Technology Limited | 3124 |
17 |
Lam Research Corporation | 4775 |
16 |
Flisom AG | 79 |
16 |
ThyssenKrupp Steel Europe AG | 924 |
16 |
VON ARDENNE Anlagentechnik GmbH | 61 |
16 |
Aixtron SE | 288 |
15 |
Beijing Naura Microelectronics Equipment Co., Ltd. | 430 |
13 |
Evatec AG | 152 |
12 |
Semiconductor Energy Laboratory Co., Ltd. | 10902 |
11 |
Taiwan Semiconductor Manufacturing Company, Ltd. | 36809 |
11 |
Other owners | 1054 |